Products: SpinTron® High Vacuum Magnetron Sputter Sources
SpinTron®: General Description
Micro Magnetics' SpinTron® is a circular magnetron sputtering gun that can have a 1, 2, 3, 4 or 6-inch diameter. It can accommodate a wide range of sputtering targets, metallic or insulating, magnetic or non-magnetic. The internal magnetic configuration utilizing a circular rare-earth NdFeB permanent magnet enables excellent film uniformity and target utilization. The SpinTron® is easy to install, operate, and maintain. The quality construction ensures long-term operation.
Quality construction: the SpinTron® series sputtering guns are designed and manufactured with a focus on details. We use high quality materials of stainless steels and ceramics. The design and selection of components and materials are based on the principles of physics and engineering.
Magnetic assembly enhancement: Electromagnetic finite element calculations are employed in the design of the permanent magnetic assembly to achieve high field strength and uniform field profile. NdFeB rare-earth permanent magnets are used in each SpinTron® product to ensure the SpinTron® a top-of-the-line magnetron sputtering tool. The magnet is coated with multiple layers of protective materials against cooling-water induced corrosion to maximize durability.
Strong coupling with external power: The SpinTron® is equipped with a standard electrical RF connector, which matches physically and electronically with a wide range of DC and RF sputtering power supplies. The low impedance sputtering heads interface easily with external power supply.
Easy installation and adjustment: The SpinTron® can be installed very easily with a standard fitting without the use of special tools. Its position in the vacuum chamber can be adjusted conveniently through a vacuum quick disconnect.
Easy target change: Change of target is as easy as "123" by first placing the target on the top surface of a gun, then putting on the target cover, and finally, adding on the anode shield. There's no need to adjust the gun to fit targets with different height.
Versatile sizes: The SpinTron® consists of 1, 2, 3, 4 and 6-inch diameter sputtering heads. Other diameters can be custom made with similar performance as the standard offerings.
Easy maintenance: The SpinTron® is easy to maintain and designed to have a long life time.
Customer centered services: The SpinTron® is covered by a one-year warranty. We guarantee our products against defective parts and poor workmanship and strive to minimize down-time for the products.
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